Oberkochen
Germany
5
2024-01-25
The entities that hold a legal rights for patent applications filed by inventor Muetzel Mario:
Mario Muetzel from Oberkochen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
ACTUATOR-SENSOR DEVICE AND LITHOGRAPHY APPARATUS
#2 | 2022-04-07Charged particle beam system
#3 | 2020-12-31Charged particle beam system
#4 | 2019-11-21Charged particle beam system
#5 | 2015-04-02Charged particle multi-beam inspection system and method of operating the same
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