Aalen
Germany
11
2017-04-20
The entities that hold a legal rights for patent applications filed by inventor Heintel Willi:
Willi Heintel from Aalen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Mirror arrangement for microlithographic projection exposure apparatus and related method
#2 | 2016-12-22Optical component
#3 | 2016-04-21Optical Element Unit And Method Of Supporting An Optical Element
#4 | 2015-04-16Optical element
#5 | 2011-03-17OPTICAL ELEMENT MODULE
#6 | 2010-03-18Connecting arrangement for an optical device
#7 | 2009-06-11Optical element unit and method of supporting an optical element
#8 | 2008-10-02Optical element module
#9 | 2008-08-28Optical module with minimized overrun of the optical element
#10 | 2007-01-18Optical subassembly and projection objective in semiconductor lithography
#11 | 2006-11-23Reflecting optical element with eccentric optical passageway
1128518 ⎘