Fremont, California
United States
12
2024-03-07
The entities that hold a legal rights for patent applications filed by inventor Schaefer David:
David Schaefer from Fremont, US has applied for patents for these inventions. The list has both pending applications and granted patents:
EDGE SEAL FOR LOWER ELECTRODE ASSEMBLY
#2 | 2018-05-31Universal non-invasive chamber impedance measurement system and associated methods
#3 | 2018-04-19Edge seal for lower electrode assembly
#4 | 2015-08-20SYSTEM AND METHOD FOR PERFORMING HOT WATER SEAL ON ELECTROSTATIC CHUCK
#5 | 2015-06-25Edge ring dimensioned to extend lifetime of elastomer seal in a plasma processing chamber
#6 | 2015-06-18Installation fixture for elastomer bands
#7 | 2014-12-18Installation fixture for elastomer bands and methods of using the same
#8 | 2013-12-26Edge seal for lower electrode assembly
#9 | 2013-05-16Installation fixture for elastomer bands and methods of using the same
#10 | 2013-04-25Window and mounting arrangement for twist-and-lock gas injector assembly of inductively coupled plasma chamber
#11 | 2013-04-25Edge seal for lower electrode assembly
#12 | 2013-02-28Method for performing hot water seal on electrostatic chuck
113992 ⎘