Hiroho Kitada

City:

Kudamatsu

Country:

Japan

Published Applications:

Last publication date:

2013-07-25

Top Assignees for applications by Hiroho Kitada

The entities that hold a legal rights for patent applications filed by inventor Kitada Hiroho:

HITACHI HIGH-TECHNOLOGIES CORPORATION 3 Tokyo, Japan

Recent patent applications by Kitada Hiroho

Hiroho Kitada from Kudamatsu, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2013-07-25

US20130189800A1

Electricity

Plasma processing apparatus and plasma processing method

#2 | 2013-02-28

US20130053997A1

Electricity

Wafer processing based on sensor detection and system learning

#3 | 2010-07-01

US20100163403A1

Electricity

Plasma processing apparatus and operation method thereof

#4 | 2009-12-31

US20090321017A1

Electricity

Plasma Processing Apparatus and Plasma Processing Method

#5 | 2009-07-16

US20090178764A1

Electricity

Plasma processing apparatus including electrostatic chuck with built-in heater

#6 | 2008-01-31

US20080023139A1

Electricity

Plasma processing apparatus and plasma processing method

#7 | 2007-11-22

US20070267145A1

Electricity

Sample table and plasma processing apparatus provided with the same

#8 | 2007-03-01

US20070044916A1

Electricity

Vacuum processing system

#9 | 2006-07-20

US20060157198A1

Electricity

Member for plasma processing apparatus and plasma processing apparatus

InventorID:

117651 ⎘