Tilman Schwertner

City:

Aalen

Country:

Germany

Published Applications:

Last publication date:

2015-06-18

Top Assignees for applications by Tilman Schwertner

The entities that hold a legal rights for patent applications filed by inventor Schwertner Tilman:

Tilman Schwertner from Aalen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:

Optical element unit for exposure processes

Optical arrangement in a projection objective of a microlithographic projection exposure apparatus

Projection objective for microlithography

Optical element unit for exposure processes having sealing element

Optical module with minimized overrun of the optical element

Holding device for optical element

InventorID:

1197663 ⎘