Robert Steger

City:

San Jose, California

Country:

United States

Published Applications:

Last publication date:

2015-07-02

Top Assignees for applications by Robert Steger

The entities that hold a legal rights for patent applications filed by inventor Steger Robert:

Robert Steger from San Jose, US has applied for patents for these inventions. The list has both pending applications and granted patents:

Method and apparatus for controlling spatial temperature distribution

METHOD OF DETERMINING A TARGET MESA CONFIGURATION OF AN ELECTROSTATIC CHUCK

Method of determining a target mesa configuration of an electrostatic chuck

Electrostatic chuck support assembly

Method of tuning thermal conductivity of electrostatic chuck support assembly

Smart component-based management techniques in a substrate processing system

InventorID:

1216184 ⎘