Suwon-Si
South Korea
2
2015-07-23
The entities that hold a legal rights for patent applications filed by inventor Sim Young-Suk:
Young-Suk Sim from Suwon-Si, KR has applied for patents for these inventions. The list has both pending applications and granted patents:
Wafer storage apparatus having gas charging portions and semiconductor manufacturing apparatus using the same
#2 | 2010-03-25Method of forming a pattern using nano imprinting and method of manufacturing a mold to form such a pattern
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