Hsinchu
Taiwan
6
2017-01-26
The entities that hold a legal rights for patent applications filed by inventor WANG Jo Fei:
Jo Fei WANG from Hsinchu, TW has applied for patents for these inventions. The list has both pending applications and granted patents:
MULTI-ZONE TEMPERATURE CONTROL FOR SEMICONDUCTOR WAFER
#2 | 2016-01-28Real-time calibration for wafer processing chamber lamp modules
#3 | 2015-07-30Multi-zone temperature control for semiconductor wafer
#4 | 2014-03-13Adaptive and automatic determination of system parameters
#5 | 2012-09-20Device performance parmeter tuning method and system
#6 | 2012-05-24Adaptive and automatic determination of system parameters
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