Tokyo
Japan
4
2023-05-18
The entities that hold a legal rights for patent applications filed by inventor Kitada Hiroho:
Hiroho Kitada from Tokyo, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Electrostatic chuck and processing apparatus
#2 | 2019-12-26Plasma processing apparatus
#3 | 2016-01-28PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
#4 | 2015-07-30PLASMA PROCESSING APPARATUS
1242978 ⎘