Austin, Texas
United States
5
2013-03-07
The entities that hold a legal rights for patent applications filed by inventor Mooring Ben:
Ben Mooring from Austin, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Wafer heating and temperature control by backside fluid injection
#2 | 2009-04-02Offset correction techniques for positioning substrates within a processing chamber
#3 | 2008-04-03Offset correction techniques for positioning substrates
#4 | 2008-04-03Offset correction methods and arrangement for positioning and inspecting substrates
#5 | 2006-06-22Wafer heating and temperature control by backside fluid injection
127708 ⎘