Somerville, Massachusetts
United States
4
2016-04-28
The entities that hold a legal rights for patent applications filed by inventor Dalberth Mark J.:
Mark J. Dalberth from Somerville, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Atomic layer deposition head
#2 | 2015-10-01Method for high-velocity and atmospheric-pressure atomic layer deposition with substrate and coating head separation distance in the millimeter range
#3 | 2012-06-07ALD COATING SYSTEM
#4 | 2011-12-22METHOD AND APPARATUS FOR PRECURSOR DELIVERY
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