Sascha Perlitz

City:

Jena

Country:

Germany

Published Applications:

Last publication date:

2025-06-26

Top Assignees for applications by Sascha Perlitz

The entities that hold a legal rights for patent applications filed by inventor Perlitz Sascha:

Carl Zeiss SMT GmbH 5 Oberkochen, Germany
CARL ZEISS SMS GMBH 2 Jena, Germany
CARL ZEISS SMT GMBH 1 0berkochen, Germany

Recent patent applications by Perlitz Sascha

Sascha Perlitz from Jena, DE has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2025-06-26

US20250208398A1

Physics

MAGNIFYING IMAGING OPTICAL UNIT FOR A METROLOGY SYSTEM FOR EXAMINING OBJECTS

#2 | 2024-05-09

US20240152057A1

Physics

APPARATUS AND METHOD FOR CHARACTERIZING A MICROLITHOGRAPHIC MASK

#3 | 2024-02-22

US20240061328A1

Physics

METHOD AND APPARATUS FOR CHARACTERIZATION OF A MICROLITHOGRAPHY MASK

#4 | 2023-07-13

US20230221571A1

Physics

OPTICAL SYSTEM, IN PARTICULAR FOR CHARACTERIZING A MICROLITHOGRAPHY MASK

#5 | 2021-12-23

US20210397099A1

Physics

Apparatus and method for characterizing a microlithographic mask

#6 | 2018-12-13

US20180357758A1

Physics

Method for three-dimensionally measuring a 3D aerial image of a lithography mask

#7 | 2017-05-11

US20170132782A1

Physics

Method for three-dimensionally measuring a 3D aerial image of a lithography mask

#8 | 2016-03-31

US20160091300A1

Physics

Method for characterizing a structure on a mask and device for carrying out said method

#9 | 2013-11-21

US20130308125A1

Physics

Method for characterizing a structure on a mask and device for carrying out said method

#10 | 2013-03-14

US20130062501A1

Physics

Grating-assisted autofocus device and autofocusing method for an imaging device

InventorID:

134369 ⎘