Oberkochen
Germany
4
2019-04-25
The entities that hold a legal rights for patent applications filed by inventor Kloesch Peter:
Peter Kloesch from Oberkochen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY INCLUDING AN ACTUATOR SYSTEM
#2 | 2015-11-05PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY INCLUDING AN ACTUATOR SYSTEM
#3 | 2011-12-29Projection exposure apparatus for semiconductor lithography including an actuator system
#4 | 2011-08-25Device for damping vibrations in projection exposure apparatuses for semiconductor lithography
1347802 ⎘