Fredericksburg, Virginia
United States
8
2019-01-17
The entities that hold a legal rights for patent applications filed by inventor Wack Daniel:
Daniel Wack from Fredericksburg, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Methods and systems for semiconductor metrology based on polychromatic soft X-Ray diffraction
#2 | 2018-03-01Spectral reflectometry for in-situ process monitoring and control
#3 | 2014-05-15Phase grating for mask inspection system
#4 | 2014-03-27Particle and chemical control using tunnel flow
#5 | 2014-02-06Multiplexing EUV sources in reticle inspection
#6 | 2013-10-17Apparatus and method for synchronizing sample stage motion with a time delay integration charge-couple device in a semiconductor inspection tool
#7 | 2013-03-14Laser-produced plasma EUV source with reduced debris generation utilizing predetermined non-thermal laser ablation
#8 | 2012-09-20Source multiplexing illumination for mask inspection
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