Lothar ENGELBRECHT

City:

Berlin

Country:

Germany

Published Applications:

Last publication date:

2022-06-16

Top Assignees for applications by Lothar ENGELBRECHT

The entities that hold a legal rights for patent applications filed by inventor ENGELBRECHT Lothar:

BASF SE 4 Ludwigshafen, Germany
BASF SE 4 Ludwigshafen am Rhein, Germany

Recent patent applications by ENGELBRECHT Lothar

Lothar ENGELBRECHT from Berlin, DE has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2022-06-16

US20220187712A1

Physics

COMPOSITION FOR AVOIDING PATTERN COLLAPSE WHEN TREATING PATTERNED MATERIALS WITH LINE-SPACE DIMENSIONS OF 50 NM OR BELOW COMPRISING A BORON-TYPE ADDITIVE

#2 | 2021-07-01

US20210198602A1

Chemistry; metallurgy

Use of compositions comprising a solvent mixture for avoiding pattern collapse when treating patterned materials with line-space dimensions of 50 nm or below

#3 | 2020-08-13

US20200255772A1

Chemistry; metallurgy

Use of compositions comprising a siloxane-type additive for avoiding pattern collapse when treating patterned materials with line-space dimensions of 50 nm or below

#4 | 2018-10-25