AACHEN
Germany
10
2015-11-26
The entities that hold a legal rights for patent applications filed by inventor ZINK PETER:
PETER ZINK from AACHEN, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Optical device and method of in situ treating an EUV optical component to enhance a reduced reflectivity
#2 | 2011-06-02Method and device for generating EUV radiation or soft X-rays
#3 | 2011-03-03Method and device for cleaning at least one optical component
#4 | 2010-11-11Method of increasing the operation lifetime of a collector optics arranged in an irradiation device
#5 | 2010-09-23Optical device and method of in situ treating an EUV optical component to enhance a reduced reflectivity
#6 | 2010-03-04Method of cleaning optical surfaces of an irradiation unit in a two-step process
#7 | 2010-03-04Method of cleaning and after treatment of optical surfaces in an irradiation unit
#8 | 2009-01-15Optical system having a cleaning arrangement
#9 | 2008-12-04Method and device for generating EUV radiation and/or soft X-ray radiation
#10 | 2006-09-14Device for and method of generating extreme ultraviolet and/or soft-x-ray radiation by means of a plasma
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