Shanghai
China
3
2022-12-15
The entities that hold a legal rights for patent applications filed by inventor YAN Yan:
Yan YAN from Shanghai, CN has applied for patents for these inventions. The list has both pending applications and granted patents:
Critical dimension error analysis method
#2 | 2017-03-02Shallow trench isolation structure and fabricating method thereof
#3 | 2015-12-03Method for forming isolation member in trench of semiconductor substrate
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