Oberkochen
Germany
6
2021-09-23
The entities that hold a legal rights for patent applications filed by inventor Runde Daniel:
Daniel Runde from Oberkochen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Method for replacing a mirror in a projection exposure apparatus, and position- and orientation data measuring device for carrying out the method
#2 | 2020-04-09Method for producing an illumination system for an EUV projection exposure system, and illumination system
#3 | 2018-12-27Method for producing an illumination system for an EUV projection exposure system, and illumination system
#4 | 2018-06-14Illumination system for EUV projection exposure apparatus, EUV projection exposure apparatus including illumination system and method for operating an EUV projection exposure apparatus
#5 | 2017-03-09Determination of a corrected variable
#6 | 2015-12-17Optical waveguide for guiding illumination light
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