Cambridge, Massachusetts
United States
8
2015-09-17
The entities that hold a legal rights for patent applications filed by inventor Chen Thomas D.:
Thomas D. Chen from Cambridge, US has applied for patents for these inventions. The list has both pending applications and granted patents:
MEMS MICROPHONE WITH SPRINGS AND INTERIOR SUPPORT
#2 | 2014-10-16Microphone system with a stop member
#3 | 2014-03-13Dual single-crystal backplate microphone system and method of fabricating same
#4 | 2013-07-11MEMS microphone with springs and interior support
#5 | 2013-03-14Method for etching material longitudinally spaced from etch mask
#6 | 2011-03-31Method of fabricating a dual single-crystal backplate microphone
#7 | 2008-04-03MEMS device with roughened surface and method of producing the same
#8 | 2006-06-01Method and apparatus for forming buried oxygen precipitate layers in multi-layer wafers
139915 ⎘