Inventor profile of:

Yohei IKEBE

City:

Tokyo

Country:

Japan

Published Applications:

38

Last publication date:

2026-05-14

Top Assignees for applications by Yohei IKEBE

The entities that hold a legal rights for patent applications filed by inventor IKEBE Yohei:

Recent patent applications by IKEBE Yohei

Yohei IKEBE from Tokyo, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2026-05-14
US20260133479A1
Physics

REFLECTIVE MASK BLANK, REFLECTIVE MASK, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

#2 | 2025-12-04
US20250370324A1
Physics

MULTILAYER REFLECTIVE FILM-ATTACHED SUBSTRATE, REFLECTIVE MASK BLANK, REFLECTIVE MASK, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

#3 | 2024-11-28
US20240393675A1
Physics

REFLECTIVE MASK BLANK, REFLECTIVE MASK, METHOD OF MANUFACTURING REFLECTIVE MASK, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

#4 | 2024-11-14
US20240377719A1
Physics

SUBSTRATE WITH MULTILAYER REFLECTIVE FILM REFLECTIVE MASK BLANK, REFLECTIVE MASK, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

#5 | 2024-09-26
US20240319577A1
Physics

REFLECTIVE MASK BLANK, REFLECTIVE MASK, AND METHOD OF MANUFACTURING REFLECTIVE MASK

#6 | 2024-07-11
US20240231216A1
Physics

MASK BLANK, REFLECTIVE MASK, AND METHOD FOR PRODUCING SEMICONDUCTOR DEVICES

#7 | 2024-06-06
US20240184193A1
Physics

MASK BLANK, REFLECTIVE MASK, AND METHOD FOR PRODUCING SEMICONDUCTOR DEVICE

#8 | 2024-03-28
US20240103355A1
Physics

Reflective mask blank, reflective mask and method for manufacturing a semiconductor device

#9 | 2024-03-28
US20240103354A1
Physics

Reflective mask blank and reflective mask

#10 | 2024-02-29
US20240069428A1
Physics

REFLECTIVE MASK BLANK, REFLECTIVE MASK, REFLECTIVE MASK MANUFACTURING METHOD, AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD

#11 | 2024-02-01
US20240036458A1
Physics

Reflective mask blank, reflective mask, method of manufacturing reflective mask, and method of manufacturing semiconductor device

#12 | 2024-02-01
US20240036457A1
Physics

Reflective mask blank, reflective mask and manufacturing method thereof, and semiconductor device manufacturing method

#13 | 2023-10-19
US20230333459A1
Physics

REFLECTIVE MASK BLANK, REFLECTIVE MASK, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

#14 | 2023-08-03
US20230244135A1
Physics

Reflective mask blank, reflective mask and method of manufacturing semiconductor device

#15 | 2023-06-01
US20230168575A1
Physics

Reflective mask blank, reflective mask and manufacturing method thereof, and semiconductor device manufacturing method

#16 | 2023-03-23
US20230087016A1
Physics

Reflective mask blank, reflective mask, method of manufacturing reflective mask, and method of manufacturing semiconductor device

#17 | 2023-03-09
US20230076438A1
Physics

REFLECTIVE MASK BLANK, REFLECTIVE MASK, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

#18 | 2022-12-08
US20220390826A1
Physics

REFLECTIVE MASK BLANK, REFLECTIVE MASK, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

#19 | 2022-04-21
US20220121102A1
Physics

REFLECTIVE MASK BLANK, REFLECTIVE MASK, METHOD FOR PRODUCING SAME, AND METHOD FOR PRODUCING SEMICONDUCTOR DEVICE

#20 | 2022-04-07
US20220107557A1
Physics

Reflective mask blank, reflective mask, and method for manufacturing semiconductor device

#21 | 2021-10-07
US20210311382A1
Physics

Reflective mask blank, reflective mask and method of manufacturing the same, and method of manufacturing semiconductor device

#22 | 2021-08-19
US20210255536A1
Physics

Reflective mask blank, reflective mask and method of manufacturing semiconductor device

#23 | 2021-07-22
US20210223681A1
Physics

Reflective mask blank, reflective mask, method of manufacturing reflective mask, and method of manufacturing semiconductor device

#24 | 2021-07-08
US20210208498A1
Physics

Reflective mask blank, reflective mask and manufacturing method thereof, and semiconductor device manufacturing method

#25 | 2020-11-26
US20200371421A1
Physics

REFLECTIVE MASK BLANK, REFLECTIVE MASK AND METHOD FOR PRODUCING SAME, AND METHOD FOR PRODUCING SEMICONDUCTOR DEVICE

#26 | 2020-10-01
US20200310239A1
Physics

Substrate with a multilayer reflective film, reflective mask blank, reflective mask, and method of manufacturing semiconductor device

#27 | 2019-12-19
US20190384158A1
Physics

Reflective mask blank, reflective mask and method of manufacturing semiconductor device

#28 | 2019-12-19
US20190384157A1
Physics

Reflective mask blank, reflective mask and manufacturing method thereof, and semiconductor device manufacturing method

#29 | 2019-12-05
US20190369483A1
Physics

SUBSTRATE WITH CONDUCTIVE FILM, SUBSTRATE WITH MULTILAYER REFLECTIVE FILM, REFLECTIVE MASK BLANK, REFLECTIVE MASK AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

#30 | 2019-11-28
US20190361338A1
Physics

Reflective mask blank, reflective mask, method of manufacturing same, and method of manufacturing semiconductor device

#31 | 2019-11-07
US20190339608A1
Physics

Reflective mask blank, reflective mask and method of manufacturing semiconductor device

#32 | 2019-08-29
US20190265585A1
Physics

Reflective mask blank, method of manufacturing reflective mask and method of manufacturing semiconductor device

#33 | 2019-03-14
US20190079383A1
Physics

Reflective mask blank, reflective mask and method of manufacturing semiconductor device

#34 | 2018-12-13
US20180356719A1
Physics

Mask blank substrate, substrate with multilayer reflective film, reflective mask blank, reflective mask and method of manufacturing semiconductor device

#35 | 2018-12-06
US20180348628A1
Physics

Method for manufacturing reflective mask blank, and method for manufacturing reflective mask

#36 | 2018-05-03
US20180120692A1
Physics

Reflective mask blank, reflective mask, method for manufacturing reflective mask blank, and method for manufacturing semiconductor device

#37 | 2017-02-09
US20170038673A1
Physics

Reflective mask blank, reflective mask, and method for manufacturing semiconductor device

#38 | 2016-01-07
US20160004153A1
Physics

Method for manufacturing reflective mask blank, and method for manufacturing reflective mask

InventorID:

1410702 ⎘