Tokyo
Japan
3
2017-11-30
The entities that hold a legal rights for patent applications filed by inventor TSUGANE Hideaki:
Hideaki TSUGANE from Tokyo, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SPUTTERING APPARATUS
#2 | 2016-03-24Method of manufacturing semiconductor device and sputtering apparatus
#3 | 2007-10-11Method of dry cleaning silicon surface prior to forming self-aligned nickel silicide layer
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