Berkeley, California
United States
4
2017-02-09
Thomas L. Greenberg from Berkeley, US has applied for patents for these inventions. The list has both pending applications and granted patents:
MAGNET ARRAY FOR PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION
#2 | 2016-08-25STORAGE MEDIUM VACUUM SPUTTER TOOL ADJUSTABLE IDLER
#3 | 2016-04-07Inductively Coupled Plasma Enhanced Chemical Vapor Deposition
#4 | 2007-07-12Method & apparatus for cathode sputtering with uniform process gas distribution
1494088 ⎘