Rolf Scheben

MICROELECTROMECHANICAL COMPONENT AND MICROELECTROMECHANICAL INERTIAL SENSOR

MICROMECHANICAL INERTIAL SENSOR, AND METHOD FOR OPERATING A MICROMECHANICAL INERTIAL SENSOR

Sensor system and method for securing a sensor system

Micromechanical component for a rotation rate sensor and corresponding manufacturing method

Method for temperature compensation of a microelectromechanical sensor, and microelectromechanical sensor

Micromechanical structure and micromechanical sensor

MICROELECTROMECHANICAL SYSTEM AND METHOD FOR MANUFACTURING A MICROELECTROMECHANICAL SYSTEM

Micromechanical component for a yaw rate sensor and corresponding production method

Micromechanical device including a stop spring structure

Micromechanical sensor

Micromechanical yaw rate sensor and method for operating same

Microelectromechanical component

Micromechanical yaw rate sensor and method for the production thereof

MEMS component including a sound-pressure-sensitive diaphragm element and piezosensitive signal detection

MEMS component including a diaphragm element which is attached via a spring structure to the component layer structure

MEMS component including a sound-pressure-sensitive diaphragm element

Micromechanical sound transducer system and a corresponding manufacturing method

Sensor device and method for operating a sensor device having at least one seismic mass

Capacitive MEMS-sensor element having bond pads for the electrical contacting of the measuring capacitor electrodes

Micromechanical spring for an inertial sensor

MEMS microphone element

Rotation rate sensor and a method for operating a rotation rate sensor

Rotation-rate sensor having a substrate having a main extension plane for detecting a rotation rate

Micromechanical sensor system combination and a corresponding manufacturing method