Beijing
China
7
2025-02-06
The entities that hold a legal rights for patent applications filed by inventor SHE QING:
QING SHE from Beijing, CN has applied for patents for these inventions. The list has both pending applications and granted patents:
SEMICONDUCTOR PROCESS DEVICE AND WAFER SUPPORT STRUCTURE THEREOF
#2 | 2024-11-07SEMICONDUCTOR PROCESS CHAMBER, SEMICONDUCTOR PROCESS INSTRUMENT, AND SEMICONDUCTOR PROCESS METHOD
#3 | 2023-05-25Semiconductor processing apparatus
#4 | 2020-06-25Magnetron drive mechanism, magnetron assembly and reaction chamber
#5 | 2017-11-16Precleaning chamber and plasma processing apparatus
#6 | 2017-06-01Reaction chamber and semi-conductor processing device
#7 | 2016-05-26PRE-CLEANING CHAMBER AND A SEMICONDUCTOR PROCESSING APPARATUS CONTAINING THE SAME
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