Robert J. Baseman

Tool control using multistage LSTM for predicting on-wafer measurements

Controlling multi-stage manufacturing process based on internet of things (IOT) sensors and cognitive rule induction

STATISTICAL FRAMEWORK FOR TOOL CHAMBER MATCHING IN SEMICONDUCTOR MANUFACTURING PROCESSES

Controlling multi-stage manufacturing process based on internet of things (IOT) sensors and cognitive rule induction

Controlling multi-stage manufacturing process based on internet of things (IoT) sensors and cognitive rule induction

System and method for identifying significant and consumable-insensitive trace features

Run-to-run control utilizing virtual metrology in semiconductor manufacturing

Method and apparatus for hierarchical wafer quality predictive modeling

Method and Apparatus for Hierarchical Wafer Quality Predictive Modeling

Enhancing investigation of variability by inclusion of similar objects with known differences to the original ones

Continuous prediction of expected chip performance throughout the production lifecycle

Method and system for evaluating a machine tool operating characteristics

Comprehensive analysis of queue times in microelectronic manufacturing

SYSTEM FOR MONITORING MULTI-ORDERABLE MEASUREMENT DATA

Detecting combined tool incompatibilities and defects in semiconductor manufacturing

Foreign material contamination detection

Comprehensive analysis of queue times in microelectronic manufacturing

Enhancing investigation of variability by inclusion of similar objects with known differences to the original ones

Method and system for evaluating a machine tool operating characteristics

SYSTEM FOR MONITORING MULTI-ORDERABLE MEASUREMENT DATA

System and method for rule-based data mining and problem detection for semiconductor fabrication

System and method for rule-based data mining and problem detection for semiconductor fabrication

Method and system for generating a business case for a server infrastructure