Stuttgart
Germany
3
2017-06-08
The entities that hold a legal rights for patent applications filed by inventor BECKER Moritz:
Moritz BECKER from Stuttgart, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Reflective optical element
#2 | 2016-07-21OPTICAL ARRANGEMENT, IN PARTICULAR PLASMA LIGHT SOURCE OR EUV LITHOGRAPHY SYSTEM
#3 | 2012-11-08Projection objective of a microlithographic projection exposure apparatus
1596183 ⎘