Aalen
Germany
37
2025-05-01
The entities that hold a legal rights for patent applications filed by inventor Hetzler Jochen:
Jochen Hetzler from Aalen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
MEASURING ASSEMBLY FOR DETECTING A DISTANCE BETWEEN TWO ELEMENTS, DISTANCE MEASURING DEVICE, OPTICAL MEASURING SYSTEM AND METHOD
#2 | 2024-03-07MEASUREMENT DEVICE FOR INTERFEROMETRIC MEASUREMENT OF A SURFACE SHAPE
#3 | 2023-02-16Method and device for correcting a telecentricity error of an imaging device
#4 | 2022-12-08MEASURING DEVICE FOR INTERFEROMETRIC SHAPE MEASUREMENT
#5 | 2022-11-03MEASURING APPARATUS FOR INTERFEROMETRIC SHAPE MEASUREMENT
#6 | 2022-06-16Method for calibrating a measuring apparatus
#7 | 2022-06-02Diffractive optical element for a test interferometer
#8 | 2022-01-13MEASUREMENT METHOD FOR INTERFEROMETRICALLY DETERMINING A SURFACE SHAPE
#9 | 2021-12-02Device and method for characterizing the surface shape of a test object
#10 | 2020-07-16Compensation optical system for an interferometric measuring system
#11 | 2019-05-23Measuring device for interferometric determination of a shape of an optical surface
#12 | 2019-02-14Method for aligning a mirror of a microlithographic projection exposure apparatus
#13 | 2018-04-19Interferometric measuring arrangement
#14 | 2018-03-29Measuring method and measuring arrangement for an imaging optical system
#15 | 2017-12-28Projection exposure tool for microlithography and method for microlithographic imaging
#16 | 2017-11-30Test device and method for testing a mirror
#17 | 2017-03-23Projection exposure tool for microlithography and method for microlithographic imaging
#18 | 2017-01-26Method for aligning a mirror of a microlithographic projection exposure apparatus
#19 | 2016-05-05Mask inspection system for inspecting lithography masks
#20 | 2016-04-28PROJECTION EXPOSURE TOOL FOR MICROLITHOGRAPHY AND METHOD FOR MICROLITHOGRAPHIC IMAGING
#21 | 2015-07-16DIFFRACTIVE OPTICAL ELEMENT AND MEASURING METHOD
#22 | 2015-02-12Projection exposure tool for microlithography and method for microlithographic imaging
#23 | 2013-09-26Projection exposure tool for microlithography and method for microlithographic imaging
#24 | 2013-07-18Projection Exposure Tool for Microlithography and Method for Microlithographic Exposure
#25 | 2013-03-28Microlithographic projection exposure apparatus
#26 | 2012-09-06Mirror of a projection exposure apparatus for microlithography with mirror surfaces on different mirror sides, and projection exposure apparatus
#27 | 2012-06-28Method and calibration mask for calibrating a position measuring apparatus
#28 | 2012-04-19Microlithographic projection exposure apparatus
#29 | 2010-08-12Projection objective for microlithography
#30 | 2010-07-15Optical element and method of calibrating a measuring apparatus comprising a wave shaping structure
#31 | 2010-06-03PROJECTION EXPOSURE SYSTEM FOR MICROLITHOGRAPHY
#32 | 2009-10-20Optical system, method of manufacturing an optical system and method of manufacturing an optical element
#33 | 2009-03-19Microlithographic projection exposure apparatus
#34 | 2008-06-12Hologram and method of manufacturing an optical element using a hologram
#35 | 2006-12-07Method of qualifying a diffraction grating and method of manufacturing an optical element
#36 | 2006-06-13Method of manufacturing an optical element using a hologram
#37 | 2005-06-09Mask for use in a microlithographic projection exposure apparatus
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