Aalen
Germany
11
2016-03-17
The entities that hold a legal rights for patent applications filed by inventor Scharnweber Ralf:
Ralf Scharnweber from Aalen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Illumination system for a microlithographic projection exposure apparatus
#2 | 2013-06-13Illumination system for a microlithographic projection exposure apparatus
#3 | 2013-03-28Optical system for a microlithographic projection exposure apparatus and microlithographic exposure method
#4 | 2011-04-14Optical integrator for an illumination system of a microlithographic projection exposure apparatus
#5 | 2011-03-17Illumination optics for EUV microlithography and related system and apparatus
#6 | 2010-07-08Method for a multiple exposure, microlithography projection exposure installation and a projection system
#7 | 2009-01-22Optical integrator for an illumination system of a microlithographic projection exposure apparatus
#8 | 2009-01-22Illumination system for a microlithographic projection exposure apparatus
#9 | 2008-12-18Method for a multiple exposure, microlithography projection exposure installation and a projection system
#10 | 2006-03-16Illumination system for a microlithographic projection exposure apparatus
#11 | 2005-09-29Method for a multiple exposure, microlithography projection exposure installation and a projection system
163085 ⎘