Martin Vogt

City:

Mutlangen

Country:

Germany

Published Applications:

Last publication date:

2021-04-22

Top Assignees for applications by Martin Vogt

The entities that hold a legal rights for patent applications filed by inventor Vogt Martin:

Martin Vogt from Mutlangen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:

Support of an optical unit

Facet mirror device

Optical system for a microlithographic projection exposure apparatus and microlithographic exposure method

InventorID:

163086 ⎘