Stuttgart
Germany
4
2020-05-21
The entities that hold a legal rights for patent applications filed by inventor Staffeld Peter Borwin:
Peter Borwin Staffeld from Stuttgart, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Method for setting a pressure in a cavity formed with the aid of a substrate and a substrate cap, and system
#2 | 2019-01-17Method for producing a multilayer MEMS component, and corresponding multilayer MEMS component
#3 | 2017-07-20Etching device and etching method
#4 | 2016-10-20Method for manufacturing microelectromechanical structures in a layer sequence and a corresponding electronic component having a microelectromechanical structure
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