Jan Rothe

City:

Dresden

Country:

Germany

Published Applications:

Last publication date:

2013-03-28

Top Assignees for applications by Jan Rothe

The entities that hold a legal rights for patent applications filed by inventor Rothe Jan:

Jan Rothe from Dresden, DE has applied for patents for these inventions. The list has both pending applications and granted patents:

METHODS AND SYSTEMS FOR SEMICONDUCTOR FABRICATION WITH LOCAL PROCESSING MANAGEMENT

Method and apparatus for routing wafer pods to allow parallel processing

Method and system for locally buffering substrate carriers in an overhead transport system for enhancing input/output capabilities of process tools

Method and system for removing empty carriers from process tools by controlling an association between control jobs and carrier

METHOD AND SYSTEM FOR ANALYZING STANDARD TOOL MESSAGES IN A MANUFACTURING ENVIRONMENT

InventorID:

168706 ⎘