Fabian Haacker

City:

Aalen

Country:

Germany

Published Applications:

Last publication date:

2026-03-26

Top Assignees for applications by Fabian Haacker

The entities that hold a legal rights for patent applications filed by inventor Haacker Fabian:

Carl Zeiss SMT GmbH 6 Oberkochen, Germany

Recent patent applications by Haacker Fabian

Fabian Haacker from Aalen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2026-03-26

US20260084957A1

Performing operations; transporting

METHODS FOR POST-PROCESSING AND FOR HANDLING OF MEMS CHIPS

#2 | 2026-01-15

US20260015226A1

Performing operations; transporting

METHOD FOR PRODUCING A MEMS MIRROR ARRAY, AND MEMS MIRROR ARRAY

#3 | 2025-08-14

US20250258437A1

Physics

EUV MULTI-MIRROR ARRANGEMENT

#4 | 2025-06-26

US20250206598A1

Performing operations; transporting

APPARATUS FOR STRESS-REDUCED MOUNTING OF MEMS-BASED MICROMIRRORS

#5 | 2024-12-26

US20240426603A1

Physics

OPTICAL DEVICE, METHOD FOR MEASURING AN ACTUAL TILT OF AN OPTICAL SURFACE OF AN OPTICAL ELEMENT, AND LITHOGRAPHY SYSTEM

#6 | 2024-07-25

US20240248408A1

Physics

MULTI-MIRROR ARRAY

#7 | 2017-09-28

US20170276842A1

Physics

Mirror device

#8 | 2016-11-24

US20160342095A1

Physics

Mirror array

#9 | 2016-11-24

US20160342094A1

Physics

Method for illuminating an object field of a projection exposure system

#10 | 2016-06-16

US20160170201A1

Physics

Optical component

InventorID:

1718925 ⎘