Mie
Japan
3
2017-08-31
The entities that hold a legal rights for patent applications filed by inventor llMORI Hiroyasu:
Hiroyasu llMORI from Mie, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Dust collecting apparatus, substrate processing system, and method of manufacturing semiconductor device
#2 | 2017-06-01METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE MANUFACTURING APPARATUS
#3 | 2016-12-15Substrate treatment apparatus and substrate treatment method
1739207 ⎘