Seongnam-si
South Korea
4
2024-11-07
The entities that hold a legal rights for patent applications filed by inventor LEE Eunwoo:
Eunwoo LEE from Seongnam-si, KR has applied for patents for these inventions. The list has both pending applications and granted patents:
METHOD AND SYSTEM FOR MONITORING SUBSTRATE PROCESSING APPARATUS
#2 | 2022-06-23Method and system for monitoring substrate processing apparatus
#3 | 2019-04-11Method of etching substrate
#4 | 2016-12-22Substrate processing system, method of managing the same and method of manufacturing semiconductor device with the same
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