Tracy, California
United States
4
2023-12-07
The entities that hold a legal rights for patent applications filed by inventor Chung Patrick:
Patrick Chung from Tracy, US has applied for patents for these inventions. The list has both pending applications and granted patents:
COLD EDGE LOW TEMPERATURE ELECTROSTATIC CHUCK
#2 | 2017-02-23Edge ring assembly for improving feature profile tilting at extreme edge of wafer
#3 | 2012-11-29MINIMIZATION OF MASK UNDERCUT ON DEEP ETCH
#4 | 2008-12-18Minimization of mask undercut on deep silicon etch
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