Dresden
Germany
6
2018-07-19
The entities that hold a legal rights for patent applications filed by inventor Wagner Heiko:
Heiko Wagner from Dresden, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Mobile dispense device for chemicals used in micro-processing
#2 | 2017-03-23Method including an adjustment of a plurality of wafer handling elements, system including a plurality of wafer handling elements and photolithography track
#3 | 2011-06-14Method of providing context specific recipes in a semiconductor facility by defining product categories
#4 | 2006-08-31Method of operating an advanced process controller by dynamically adapting hierarchy levels
#5 | 2006-02-28Method and system for improving exposure uniformity in a step and repeat process
#6 | 2005-06-02Method and system for increasing product yield by controlling lithography on the basis of electrical speed data
1832665 ⎘