Isaac Mazor

Closed-loop control of X-ray knife edge

Measurement of small features using XRF

X-ray scatterometry apparatus

Method for accurately determining the thickness and/or elemental composition of small features on thin-substrates using micro-XRF

X-ray source assembly

Angle calibration for grazing-incidence X-ray fluorescence (GIXRF)

Estimation of XRF intensity from an array of micro-bumps

X-ray inspection of bumps on a semiconductor substrate

High-resolution X-ray diffraction measurement with enhanced sensitivity

Combining X-ray and VUV analysis of thin film layers

High-resolution X-ray diffraction measurement with enhanced sensitivity

Automated selection of X-ray reflectometry measurement locations

Accurate measurement of layer dimensions using XRF

Inspection of small features using X-ray fluorescence

Control of X-ray beam spot size

Automated selection of X-ray reflectometry measurement locations

Overlay metrology using X-rays

Measurement of properties of thin films on sidewalls

Detection of dishing and tilting using X-ray fluorescence

Enhancing resolution of X-ray measurements by sample motion

Efficient measurement of diffuse X-ray reflections

Measurement of critical dimensions using X-ray diffraction in reflection mode

Multifunction X-ray analysis system

Combined X-ray reflectometer and diffractometer

Enhancement of X-ray reflectometry by measurement of diffuse reflections

Beam centering and angle calibration for X-ray reflectometry

Dual-wavelength x-ray monochromator

XRR detector readout processing

Optical alignment of X-ray microanalyzers