Chungcheongnam-do
South Korea
3
2021-04-22
The entities that hold a legal rights for patent applications filed by inventor YOUN Junhee:
Junhee YOUN from Chungcheongnam-do, KR has applied for patents for these inventions. The list has both pending applications and granted patents:
Substrate processing apparatus, process fluid treating apparatus, and ozone decomposition method
#2 | 2018-04-26SUBSTRATE PROCESSING APPARATUS, PROCESS FLUID TREATING APPARATUS, AND OZONE DECOMPOSITION METHOD
#3 | 2017-04-27Dissolved ozone removal unit, apparatus for treating substrate, method of removing dissolved ozone, and method of cleaning substrate
1860654 ⎘