Oberkochen
Germany
7
2025-06-26
The entities that hold a legal rights for patent applications filed by inventor BAUMER Florian:
Florian BAUMER from Oberkochen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
ARRANGEMENT, METHOD AND COMPUTER PROGRAM PRODUCT FOR CALIBRATING FACET MIRRORS
#2 | 2025-01-23ARRANGEMENT, METHOD AND COMPUTER PROGRAM PRODUCT FOR CALIBRATING FACET MIRRORS
#3 | 2021-09-23Method for replacing a mirror in a projection exposure apparatus, and position- and orientation data measuring device for carrying out the method
#4 | 2021-07-15Device and method for measuring the beam angle of a light beam guided by a beam guiding optical unit
#5 | 2021-06-24Metrology system and method for measuring an excitation laser beam in an EUV plasma source
#6 | 2020-08-06Method for restoring an illumination system for an EUV apparatus, and detector module
#7 | 2017-05-04System and method for analyzing a light beam guided by a beam guiding optical unit
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