Dresden
Germany
3
2018-07-19
The entities that hold a legal rights for patent applications filed by inventor GRUNDKE Wolfram:
Wolfram GRUNDKE from Dresden, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Mobile dispense device for chemicals used in micro-processing
#2 | 2017-05-18Methods, apparatus, and systems for minimizing defectivity in top-coat-free lithography and improving reticle CD uniformity
#3 | 2009-11-05Method of detecting repeating defects in lithography masks on the basis of test substrates exposed under varying conditions
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