Espoo
Finland
5
2022-11-10
The entities that hold a legal rights for patent applications filed by inventor Soderlund Mikko:
Mikko Soderlund from Espoo, FI has applied for patents for these inventions. The list has both pending applications and granted patents:
METHOD AND APPARATUS FOR PROCESSING SURFACE OF A SEMICONDUCTOR SUBSTRATE
#2 | 2021-04-22NOZZLE HEAD AND APPARATUS
#3 | 2019-06-20Method of coating a substrate and an apparatus
#4 | 2018-09-13APPARATUS FOR PROCESSING A SURFACE OF SUBSTRATE AND METHOD OPERATING THE APPARATUS
#5 | 2017-06-08Nozzle Head, Apparatus and Method for Subjecting Surface of Substrate to Successive Surface Reactions
1895618 ⎘