Schwaebisch Gmuend
Germany
3
2018-12-20
The entities that hold a legal rights for patent applications filed by inventor Andre Stephan:
Stephan Andre from Schwaebisch Gmuend, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Projection lens, projection exposure apparatus and projection exposure method for EUV microlithography
#2 | 2017-10-05Projection exposure method and projection exposure apparatus
#3 | 2017-06-15Projection lens, projection exposure apparatus and projection exposure method for EUV microlithography
1903265 ⎘