Oberkochen
Germany
6
2026-03-12
The entities that hold a legal rights for patent applications filed by inventor Golde Daniel:
Daniel Golde from Oberkochen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
METHOD FOR PRODUCING AN OPTICAL IMAGING SYSTEM FOR A MICROLITHOGRAPHY APPARATUS
#2 | 2023-04-20Mirror, in particular for a microlithographic projection exposure apparatus
#3 | 2022-04-07Stop, optical system and lithography apparatus
#4 | 2018-12-20Projection lens, projection exposure apparatus and projection exposure method for EUV microlithography
#5 | 2017-10-05Projection exposure method and projection exposure apparatus
#6 | 2017-06-15Projection lens, projection exposure apparatus and projection exposure method for EUV microlithography
1903266 ⎘