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Inventor profile of:

Sha Rin

City:

Shanghai

Country:

China

Published Applications:

4

Last publication date:

2022-05-12

Top Assignees for applications by Sha Rin

The entities that hold a legal rights for patent applications filed by inventor Rin Sha:

ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA 3 Shanghai, China

Recent patent applications by Rin Sha

Sha Rin from Shanghai, CN has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2022-05-12

US20220148859A1

Multi-zone heating apparatus, bottom electrode assembly, plasma processing apparatus, and temperature adjusting method

#2 | 2022-01-06

US20220005677A1

Control method for multi-zone active-matrix temperature control in plasma processing apparatus

#3 | 2020-05-21

US20200161104A1

Multi-zone temperature control plasma reactor

#4 | 2017-06-29

US20170186592A1

MULTI-ZONE ACTIVE-MATRIX TEMPERATURE CONTROL SYSTEM AND TEMPERATURE CONTROL METHOD, AND ELECTROSTATIC CHUCK AND PLASMA PROCESSING APPARATUS APPLY THEREOF

InventorID:

1918586 ⎘