Daniel Runde

City:

Satteldorf

Country:

Germany

Published Applications:

Last publication date:

2018-06-14

Top Assignees for applications by Daniel Runde

The entities that hold a legal rights for patent applications filed by inventor Runde Daniel:

Carl Zeiss SMT GmbH 3 Oberkochen, Germany
CARL ZEISS SMT GMBH 1 Oberkcochen, Germany

Recent patent applications by Runde Daniel

Daniel Runde from Satteldorf, DE has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2018-06-14

US20180164693A1

Physics

Illumination system for EUV projection exposure apparatus, EUV projection exposure apparatus including illumination system and method for operating an EUV projection exposure apparatus

#2 | 2017-09-14

US20170261680A1

Physics

Optical waveguide for guiding illumination light

#3 | 2012-10-04

US20120249988A1

Physics

Optical beam deflecting element, illumination system including same, and related method

InventorID:

1983142 ⎘