Yulin PENG

City:

Beijing

Country:

China

Published Applications:

Last publication date:

2026-05-21

Top Assignees for applications by Yulin PENG

The entities that hold a legal rights for patent applications filed by inventor PENG Yulin:

Yulin PENG from Beijing, CN has applied for patents for these inventions. The list has both pending applications and granted patents:

SEGMENTED FOCUS RING FOR PLASMA SEMICONDUCTOR PROCESSING AND PROCESSING TOOL CONFIGURED TO USE The SEGMENTED FOCUS RING

MULTI-LAYER FOCUS RING FOR PLASMA SEMICONDUCTOR PROCESSING

SUBSTRATE SUPPORT INCLUDING MULTIPLE RADIO FREQUENCY (RF) ELECTRODES

REACTION CHAMBER COMPONENT, PREPARATION METHOD, AND REACTION CHAMBER

REACTION CHAMBER COMPONENT, PREPARATION METHOD, AND REACTION CHAMBER

Electrostatic chuck mechanism and semiconductor processing device having the same

Method of operating semiconductor manufacturing apparatus and semiconductor devices

Apparatus for plasma treatment and method of operating the apparatus

InventorID:

2016388 ⎘