Oberkochen
Germany
9
2022-07-28
The entities that hold a legal rights for patent applications filed by inventor Baier Juergen:
Juergen Baier from Oberkochen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
OPTICAL SYSTEM
#2 | 2020-04-09Method for producing an illumination system for an EUV projection exposure system, and illumination system
#3 | 2019-11-21OPTICAL SYSTEM
#4 | 2018-12-27Method for producing an illumination system for an EUV projection exposure system, and illumination system
#5 | 2018-04-12Optical system
#6 | 2018-03-15Method for producing a lens for a lithography apparatus, and measurement system
#7 | 2013-04-25Optical system and multi facet mirror of a microlithographic projection exposure apparatus
#8 | 2013-04-25METHOD FOR PRODUCING FACET MIRRORS AND PROJECTION EXPOSURE APPARATUS
#9 | 2010-01-14METHOD FOR PRODUCING FACET MIRRORS AND PROJECTION EXPOSURE APPARATUS
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