YOUNGHEE LEE

City:

Boulder, Colorado

Country:

United States

Published Applications:

Last publication date:

2019-02-21

Top Assignees for applications by YOUNGHEE LEE

The entities that hold a legal rights for patent applications filed by inventor LEE YOUNGHEE:

YOUNGHEE LEE from Boulder, US has applied for patents for these inventions. The list has both pending applications and granted patents:

Enhancement of thermal atomic layer etching

Atomic layer etching processes using sequential, self-limiting thermal reactions comprising oxidation and fluorination

Methods of atomic layer etching (ALE) using sequential, self-limiting thermal reactions

InventorID:

2071341 ⎘