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Inventor profile of:

Tae Won Kim

City:

Dublin, California

Country:

United States

Published Applications:

9

Last publication date:

2018-09-06

Top Assignees for applications by Tae Won Kim

The entities that hold a legal rights for patent applications filed by inventor Kim Tae Won:

  • LAM RESEARCH CORPORATION 8 Fremont, CA United States

Recent patent applications by Kim Tae Won

Tae Won Kim from Dublin, US has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2018-09-06
US20180254203A1
Electricity

APPARATUS AND METHOD TO REDUCE PARTICLE FORMATION ON SUBSTRATES IN POST SELECTIVE ETCH PROCESS

#2 | 2014-09-18
US20140272459A1
Electricity

Corrosion resistant aluminum coating on plasma chamber components

#3 | 2014-06-26
US20140179106A1
Electricity

IN-SITU METAL RESIDUE CLEAN

#4 | 2014-02-20
US20140051256A1
Electricity

ETCH WITH MIXED MODE PULSING

#5 | 2014-02-06
US20140038419A1
Electricity

Method for providing vias

#6 | 2014-01-30
US20140030893A1
Electricity

METHOD FOR SHRINK AND TUNE TRENCH/VIA CD

#7 | 2013-10-10
US20130267097A1
Electricity

METHOD AND APPARATUS FOR FORMING FEATURES WITH PLASMA PRE-ETCH TREATMENT ON PHOTORESIST

#8 | 2013-04-30
US13329035
-

Silicon nitride dry trim without top pulldown

#9 | 2013-04-25
US20130102156A1
Electricity

COMPONENTS OF PLASMA PROCESSING CHAMBERS HAVING TEXTURED PLASMA RESISTANT COATINGS

InventorID:

210394 ⎘

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