Dublin, California
United States
9
2018-09-06
The entities that hold a legal rights for patent applications filed by inventor Kim Tae Won:
Tae Won Kim from Dublin, US has applied for patents for these inventions. The list has both pending applications and granted patents:
APPARATUS AND METHOD TO REDUCE PARTICLE FORMATION ON SUBSTRATES IN POST SELECTIVE ETCH PROCESS
#2 | 2014-09-18Corrosion resistant aluminum coating on plasma chamber components
#3 | 2014-06-26IN-SITU METAL RESIDUE CLEAN
#4 | 2014-02-20ETCH WITH MIXED MODE PULSING
#5 | 2014-02-06Method for providing vias
#6 | 2014-01-30METHOD FOR SHRINK AND TUNE TRENCH/VIA CD
#7 | 2013-10-10METHOD AND APPARATUS FOR FORMING FEATURES WITH PLASMA PRE-ETCH TREATMENT ON PHOTORESIST
#8 | 2013-04-30Silicon nitride dry trim without top pulldown
#9 | 2013-04-25COMPONENTS OF PLASMA PROCESSING CHAMBERS HAVING TEXTURED PLASMA RESISTANT COATINGS
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