Tokyo
Japan
5
2013-01-10
The entities that hold a legal rights for patent applications filed by inventor NOGAMI Mitsuhide:
Mitsuhide NOGAMI from Tokyo, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
METHOD FOR PROCESSING OUTER PERIPHERY OF SUBSTRATE AND APPARATUS THEREOF
#2 | 2008-12-04PLASMA PROCESSING APPARATUS
#3 | 2008-10-02Plasma processing apparatus and method thereof
#4 | 2008-03-27Method For Processing Outer Periphery Of Substrate And Apparatus Thereof
#5 | 2006-11-23Plasma processing apparatus and method thereof
21499 ⎘